JPH025330B2 - - Google Patents
Info
- Publication number
- JPH025330B2 JPH025330B2 JP56157594A JP15759481A JPH025330B2 JP H025330 B2 JPH025330 B2 JP H025330B2 JP 56157594 A JP56157594 A JP 56157594A JP 15759481 A JP15759481 A JP 15759481A JP H025330 B2 JPH025330 B2 JP H025330B2
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- surface acoustic
- acoustic wave
- aluminum nitride
- epitaxial layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 86
- 239000013078 crystal Substances 0.000 claims description 83
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 43
- 229910052710 silicon Inorganic materials 0.000 claims description 43
- 239000010703 silicon Substances 0.000 claims description 43
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 40
- 230000000644 propagated effect Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 description 47
- 239000006185 dispersion Substances 0.000 description 41
- 239000000758 substrate Substances 0.000 description 34
- 230000008878 coupling Effects 0.000 description 17
- 238000010168 coupling process Methods 0.000 description 17
- 238000005859 coupling reaction Methods 0.000 description 17
- 238000001514 detection method Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15759481A JPS5859617A (ja) | 1981-10-05 | 1981-10-05 | 弾性表面波素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15759481A JPS5859617A (ja) | 1981-10-05 | 1981-10-05 | 弾性表面波素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5859617A JPS5859617A (ja) | 1983-04-08 |
| JPH025330B2 true JPH025330B2 (en]) | 1990-02-01 |
Family
ID=15653119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15759481A Granted JPS5859617A (ja) | 1981-10-05 | 1981-10-05 | 弾性表面波素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5859617A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04207106A (ja) * | 1990-11-30 | 1992-07-29 | Kubota Corp | 乗用型芝刈機 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0388406A (ja) * | 1989-04-11 | 1991-04-12 | Sanyo Electric Co Ltd | 弾性表面波素子 |
-
1981
- 1981-10-05 JP JP15759481A patent/JPS5859617A/ja active Granted
Non-Patent Citations (1)
| Title |
|---|
| NATIONAL TECHNICAL REPORT=1976 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04207106A (ja) * | 1990-11-30 | 1992-07-29 | Kubota Corp | 乗用型芝刈機 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5859617A (ja) | 1983-04-08 |
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